This standard has been revised by ISO/TR 14999-2:2019
Abstract
ISO/TR 14999-2:2005 gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports and calibration certificates.
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Status: WithdrawnPublication date: 2005-03
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Edition: 1Number of pages: 59
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- ICS :
- 37.020 Optical equipment
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